Scalable self-assembly process for the fabrication of sub-millimetre three-dimensional cylindrical tubes

IET Micro & Nano Letters(2016)

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摘要
The analysis, simulation and experimental fabrication of three-dimensional (3D) cylindrical tubes formed from 2D aluminium/silicon dioxide (Al/SiO2) substrates are presented. The photolithographically fabricated planar Al/SiO2 substrates bend under residual mechanical stress after release, self-assembling into 3D cylindrical tubes. They present an analytical model that allows them to reliably predict the resulting radius of curvature of bi-layer Al/SiO2 tubes with uniform cross-sections, and provides an approximate solution for SiO2 substrates with patterned Al cross-sections. Finite element analysis simulations and measurements of fabricated tubes show agreement with the model. In addition, they show through a series of batch experiments that the self-assembly process is repeatable with proper design of the substrates.
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关键词
aluminium compounds,finite element analysis,self-assembly,silicon compounds,substrates,three-dimensional integrated circuits,2D aluminium-silicon dioxide substrates,3D cylindrical tubes,Al-SiO2,finite element analysis simulations,patterned Al cross-sections,photolithographically fabricated planar Al-SiO2 substrates,residual mechanical stress,self-assembly process,sub-millimetre three-dimensional cylindrical tubes,uniform cross-sections
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