Reversible and Irreversible Polarization Degradation of Hf0.5 Zr0.5 O2 Capacitors with Coherent Structural Transition at Elevated Temperatures
2024 IEEE International Reliability Physics Symposium (IRPS)(2024)
摘要
In this study, we investigated the reversible and irreversible polarization degradation of hafnia-based ferroelectric capacitors (FeCAPs) using the state-of-the-art spherical aberration corrected transmission electron microscope (Cs-TEM) with realtime temperature changes. The key observations are as follows: (1) Rapid thermal annealing (RTA) results in incomplete formation of the orthorhombic (o-) phase in the ferroelectric (FE) material, leading to a coherent phase boundary (CPB) between o- and tetragonal (t-) structures. (2) The movement of the o-/t-CPB with temperature corresponds to reversible changes in polarization of hafnia-based FeCAPs. (3) Irreversible degradation in polarization occurs due to migration of the o-/monoclinic (m-) CPB with temperature. These findings provide a new perspective for evaluating the stability of the o-phase in fluorite-type FE materials and offer guidance for optimizing their properties through regulation strategies.
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关键词
Ferroelectric memory,Hafnia-based ferroelectric capacitor,Polarization degradation,Coherent phase boundary
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