Optimization and test of a ring-ring typed atmospheric pressure plasma jet for optical fabrication

In recent years, the atmospheric pressure plasma jet (APPJ) has gained considerable attention in the field of optical fabrication because the chemical etching approach offers the advantage of avoiding mechanical damage to workpieces. This paper presents the development of an atmospheric pressure plasma machining system with a ring-ring typed APPJ, which exhibits several favorable characteristics. It has a relatively low processing temperature, no electrode corrosion, no plasma contamination, and a long discharge plume, etc. Optimization of the dimensional parameters and analysis of reactive gas flow rate are conducted through experimental investigations. Comparative experiments are carried out with the commonly used needle-ring typed APPJ, revealing significant improvements of the ring-ring typed APPJ, i.e., a fourfold increase in machining distance, a tenfold increase in machining efficiency, and a 58% enhancement in the stability of the material volumetric removal rate. Furthermore, on-line temperature monitoring of the footprint has been achieved due to the specific traits of the extended discharge plume. Fabrication experiments are conducted to demonstrate the significant correlation between the temperature and material removal rate, which shows the possibility of improving the accuracy of optical fabrication based on the ring-ring typed APPJ.