NbN-based half-flux-quantum element for integration with superconducting qubits

Half-flux-quantum (HFQ) logic is a superconductor logic family comprising conventional Josephson junctions (0-JJs) and pi Josephson junctions (pi-JJs). The energy scale of HFQ logic can be flexibly reduced by phase shifts owing to pi-JJs; thus, HFQ circuits are a promising building block for qubit interface circuits. In this study, we demonstrate an NbN-based HFQ circuit element compatible with NbN-based superconducting qubits for all-NbN monolithic integration of qubits and HFQ circuits. The use of NbN is beneficial for both qubits and HFQ circuits owing to its high-quality junctions and high kinetic inductance. First, we developed a prototype of an NbN-based 0-JJ/pi-JJ hybrid fabrication process for designing HFQ circuits. We evaluated 0-JJs and pi-JJs fabricated through the hybrid process, which demonstrated that the 0-JJs had a small deviation with regard to critical current density and the pi-JJs had a sufficiently high critical current density to work as pi phase shifters. Furthermore, we fabricated an HFQ superconducting quantum interference device, which is one of the most fundamental elements in HFQ circuits, and observed clear HFQ-period modulation in the magnetic flux dependence of the maximum current at 4.2 K.