One-step method to control the temperature of S and Mo source and its effect on the size and morphology of MoS2

Y. Zhang,Y. J. Zhai, J. H. Li, X. Y. Chu,W. H. Fang

FERROELECTRICS(2023)

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摘要
Molybdenum disulfide (MoS2) is a typical two-dimensional material, which is widely used in many fields because of its excellent electrical and optical properties. In recent years, the high-quality growth of MoS2 has attracted more and more attention from researchers. Many studies have reported a two-step method for the production of MoS2 by pre-deposition of molybdenum (Mo) source and then vulcanization, which is cumbersome and time-consuming, and the preparation temperature is mostly above 800(circle)C, increasing energy consumption and experimental risk. In this paper, S source and Mo source can be distinguished by double temperature zone tube furnace to prepare MoS2 material in one-step method. The temperatures of S and Mo sources were designed separately, and the effect of each temperature on the quality of MoS2 was investigated. And the monolayer MoS2 with high crystalline quality was obtained at a S source temperature of 165. C and a Mo source temperature of 680(circle)C. We produce MoS2 in one-step method at low temperature, which provides a reference for the synthesis of high-quality monolayer MoS2.
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关键词
MoS2,chemical vapor deposition,source,temperature
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