Failure analysis on the abnormal cracking of Si3N4 ceramic substrates for SiC power modules in new energy vehicles

Microelectronics Reliability(2024)

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摘要
Si3N4 ceramic with good thermal conductivity, high mechanical strength and low thermal expansion coefficient is an advanced thermal management material which has been applied to new energy vehicles. At present, with the rapid development of the electric driving technology for new energy vehicles, Si3N4 ceramic has been gradually used in SiC power modules so as to efficiently achieve the functions of heat dissipation, insulation and voltage resistance. Due to its important role in the power conversion process, the reliability of Si3N4 ceramic was vital, and any factor that might lead to its premature failure must be attached importance to. In this paper, a case about abnormal cracking of Si3N4 ceramic substrates during the high and low temperature cycling tests was reported. To solve this problem, various characterization methods were conducted to analyze the density, thermal conductivity, flexural strength, phase structure, morphology characteristics. Finally, through comprehensive analysis, the root cause that resulted in abnormal cracking of Si3N4 ceramic substrates was determined and meanwhile corresponding countermeasures were also proposed. Hopefully, the achievements of this paper will have positive significance for upgrading the quality of Si3N4 ceramic substrates and improving the service reliability of power modules.
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关键词
Power module,Heat dissipation,Si3N4 ceramic substrate,Cracking,Failure analysis
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