A mems fast steering mirror with 10 mm aperture for free-space optical communication

This paper presents a 10mm piezoelectric MEMS fast steering mirror that integrates piezoresistive sensors. The device is fabricated using an 8-inch CMOS-compatible process, packaged into a volume of 35x35x5 mm(3), weighing 22 g, which meets the miniaturization and mass production requirements for free-space optical communication. The MEMS FSM operates in double quasi-static scanning mode, with a tilting angle of 5.2 mrad. Its non-linearity of 0.31% @ +/- 2.5 mrad ensures high accuracy. The sensor has a non-linearity of 4.4% at full scale and reaches a resolution of 0.35 mu rad.