Miniaturized Diamond Quantum Magnetometer with Integrated Laser Source and All Electrical I/OS

This research reports a MEMS chip-scale diamond quantum magnetometer based on ensemble nitrogen-vacancy (NV) centers with integrated laser source and all electrical I/Os. The sensor module consists of a transistor outline (TO) packaged 532-nm diode-pumped solid state (DPSS) laser, a glass case, a diamond sensor device and a PCB. MEMS standard process is employed to integrate four key components of the sensor module, including diamond chip, microwave (MW) transmission line, long pass filter (LPF) and photodiode (PD) —in a volume of 0.26 cm ³ . We demonstrate that the sensitivity of the diamond quantum magnetometer is inversely proportional to the diameter of the laser spot. The prototype of the proposed diamond quantum magnetometer has an optimized sensitivity of 312 pTꞏHz ^-1/2 with a fluorescence conversion efficiency of 1.70%, a total volume of 2.39 cm ³ and a power consumption of 1.05 W, which enables a wide range of industrial and biological sensing applications.