In-plane and out-of-plane fm accelerometers with 130 db dynamic range through nems-based oscillators

This work introduces a new class of MEMS accelerometers, combining a sensing scheme based on continuous mode-reversal electrostatic frequency modulation (FM) with a self-sustained oscillation loop based on NEMS-gauge sensing, enabling to convert the displacement into a stress on resistive gauges. This fusion enables to hold the benefits of FM architectures, while at the same time lowering phase noise even at small resonator displacements, by exploiting high sensitivity and high robustness to parasitic-induced noise of piezoresistive sensing. This working principle is implemented for both in-plane and out-of-planes sensing devices, demonstrating a similar to 10 mu g/root Hz noise and up to +/- 70 g acceleration range at sub-1% uncompensated linearity error.