Efficient photon-pair generation empowered by dual quasi-bound states in the continuum

Here we demonstrate the efficient photon-pair generation via spontaneous parametric down conversion from a semiconductor metasurface supporting dual quasi-bound states in the continuum (quasi-BICs). In a simple metasurface design composed of AlGaAs ellipse nano-cyclinders, the two high-Q quasi-BIC resonances that coincide with the generated signal and idler frequencies significantly boost the local electric field. This leads to a substantial enhancement in the reverse classical nonlinear process of sum frequency generation and subsequently the remarkable high generation rate of photon pairs under the quantum-classical correspondence principle. Within a narrowband wavelength regime around the quasi-BIC resonances, the rate of pair production is enhanced up to ∼10^4 Hz, two orders of magnitude larger than that in the Mie resonant AlGaAs nanoantennas. Moreover, the photon pair emission is mainly concentrated in the normal direction with respect to the metasurface, and shows tunable rate with the Q factor by engineering the rotation angle of nano-cylinders. The presented work enables nanoscale sources of high-quality entangled photons which will find applications in advanced quantum imaging and communications.