Novel high-precision micro-gyroscope based on cavity optomechanical system

Micro-gyroscope is an inertial microsensor based on Coriolis principle or Sagnac effect to measure the angular rate amplitude and frequency change, which has a wide range of applications in aerospace, unmanned equipment, guided munitions. Due to the large noise, the traditional micro-gyroscopes are difficult to achieve a great breakthrough in performance. Therefore, a novel high-precision micro-gyroscope structure based on optomechanical system is proposed in the paper, which can realize ultra-high precision angular rate measurement under low power consumption. Based on the theory of opto-mechanical coupling, the working and implementation principle of the new high-precision microgyroscope are analyzed theoretically in detail. Through simulation verification and optimization, it is concluded that the theoretical angular rate measurement sensitivity is 122.2 mV/(degrees/s) and angle random walk is 0.95 degrees/h(1/2). Under the same order of inertia mass, the performance of the new micro-gyroscope is obviously better than the traditional MEMS gyroscopes.