A New High-Precision Micro-Accelerometer Based on Optomechanical System

In this paper, a new linear accelerometer based on the optomechanical system of silicon photonic crystal cavity is designed. The structure has a large mass of mechanical oscillator, which effectively reduces the thermal noise of the optomechanical system. And the silicon based photonic crystal is used for detection, which has the advantages of high sensitivity and high detection precision. Firstly, the noise which affects the detection accuracy of the optomechanical accelerometer is analyzed and the numerical expression is given. Then the mechanical structure design is described in detail and the mechanical characteristics of the accelerometer sensitive structure are analyzed by finite element method. A photonic crystal with a thickness of 500 nm, high optical Q value and optical resonance frequency in the communication C-band is simulated by FTDT simulation method. This paper introduces a new accelerometer based on optomechanical system with high sensitivity and low noise, which can be widely used in future high-precision inertial measurement, inertial navigation, micro-vibration detection and other technical fields.