Tunable microwave dual-band patch antenna through integration of metamaterials and nanoscale ferroelectrics

We present a CMOS-compatible silicon-based patch antenna providing a tunable dual-band behavior in the 8-12 GHz frequency range. The dual-band operation is induced by an asymmetrically aligned complementary split-ring resonator (CSRR) meta-atom, etched in the metallic, back-reflector part of the antenna. By rotating and moving the CSSR we can force a multimode response in the antenna cavity, which leads to the excitation of two highly radiating modes at 8 and at 10.35 GHz. The tunability is provided by the inclusion of a planar phase shifter based on an ultrathin hafnium oxide ferroelectric layer interposed between the silicon substrate and the top metallization, thus allowing us to electrically modify the radiation characteristics of the antenna in terms of resonant frequency, amplitude of the reflection coefficient, and gain, with sub -mu s values of the polarization switching time. The results are supported by theoretical modeling, full-wave electromagnetic simulations, fabrication, and experimental validation and represent a stimulus for the integration of metamaterials and two-dimensional ferroelectrics into high frequency electronics.