Microcavity Mach-Zehnder refractive index sensing in LiTaO3 crystal waveguides by a combination of femtosecond laser inscription and diamond blade dicing

Based on planar waveguides, refractive index sensors have certain advantages over conventional optical fiber sensors, including better mechanical stability and lower cross-responses to factors such as vibrations. In this study, we report for the first time a microcavity Mach-Zehnder interferometric refractive index sensor fabricated within a planar waveguide. The sensor consists of double-line waveguides made of lithium tantalate crystals written by femtosecond laser and microcavities formed by diamond blade dicing. The refractive index sensitivity of the sensor reaches approximately 1856.1 nm/RIU, with extremely low temperature cross-responses. This work provides a new alternative for developing biosensors based on femtosecond laser-written waveguides. In the future, by selecting appropriate materials and optimizing the structure, the sensing performance of this sensor is expected to be further enhanced.