Digital Transformation of High Voltage Isolation Control and Monitoring System for HVE-400 Ion Implanter
arxiv(2023)
摘要
HVE-400 ion implanter is special ion implantation equipment for semiconductor
materials boron and phosphorus doping. The ion source and extraction deflection
system are at high voltage platform, while the corresponding control system is
at ground voltage position. The control signals and measurement signals of
various parameters at the high-voltage end need to be transmitted between
ground voltage and high voltage through optical fibers to isolate high voltage.
Upgrading is carried out due to the aging of the optical fiber transmission
control and monitoring system, which cannot work stably. The transformation
replaces the original distributed single-point control method with an advanced
distributed centralized control method, and integrates all control and
monitoring functions into an industrial control computer for digital operation
and display. In the computer software, two kinds of automatic calculation of
ion mass number are designed. After upgrading, the implanter high-voltage
platform control and monitoring system features digitalization, centralized
control, high reliability, strong anti-interference, fast communication speed,
and easy operation.
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关键词
High voltage isolation,Optical fiber communication,Control signal,Feedback signal,Decentralized centralized model,Digital graphical interface.
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