A Study of MEMS 3-axis Force Sensor Integrated with Self-calibration Function

To improve the accuracy of the measurement results of traditional sensors and save additional calibration costs, this paper reports the design and calibration of a MEMS 3-axis force sensor with a piezoelectric drive to generate the force signal source. The finite element simulation verifies the working principle and calibration function of the sensor which has a linear range of $> 2\mathrm{N}$ in the 3-axis, as well as the detection sensitivity of the sensor is 477.74 $\text{fF}/\mathrm{N}$ in the normal(z) direction and 723.66 $\text{fF}/\mathrm{N}$ in the tangential(x/y) direction. Under 10V voltage driving, the normal and tangential calibration ranges reach 174 $\text{mN}$ and 355 $\text{mN}$ respectively. The sensor designed in this paper can be used as an essential medium for intelligent robots to sense human life and has good potential for applications in medical care, the robotics industry, and wearable devices.