Study on the joint effect of the driving voltage and carrying load on the piezoelectric inertial actuator for positioning

With the rapid development of innovative application fields, such as artificial nerve electrodes and ultraprecision machining fields, the demands of the multi-objective functions of piezoelectric inertial actuators (PIAs) have made researchers work towards optimizing key variables to improve system output performances. To achieve this goal, a vibration-damping-spring theoretical model for the PIA is established in this work, in which an improved LuGre friction model is investigated to carry out a numerical simulation analysis. Based on the validated model, the essential mechanism of the PIA has been revealed, and, as the key control variables of this system, the driving voltage and carrying load have been systematically investigated. Following this, a theoretical analysis and experiments reveal the joint effect laws between the driving voltage and carrying load on the system's output performances. The results indicate that the resolution of the actuator is 0.019 mrad with a standard deviation of 0.0021 mrad under the condition of 30 V and 10 g for the demands of cell manipulation. Under the condition of 120 V and 30 g, the average angular speed is 0.665 mrad/s with a standard deviation of 0.0156 mrad, allowing the actuator to be used in ultra-precision machining fields. Furthermore, the laws optimize the control variables to make the various performances of PIAs suitable for the needs of different advanced application domains.