A Logic Fully Comparable Single-Supply Capacitor-Less 1-FinFET-1-Source-Channel-Drain-Diode (1T1D) Embedded DRAM MACRO in 16-nm FinFET

We introduce one kind of embedded dynamic-random-access-memory (eDRAM) array (16 kilo-bits) with peripheral circuits. Each cell in an array comprises 1-control-Fin-type-field-effect-transistor [FinFET (T)] and 1-storage-npn-diode (D). The latter can be implemented by a nFinFET with the floating gate electrode. This 1T1D eDRAM technology is fully integrated with the 16-nm FinFET process and can be continually shrunk to the 3-nm technology node. The size of the unit-cell is $0.0242~\mu \text{m}~^{\mathrm{ 2}}$ . This 1T1D eDRAM cell can be programmed by the Zener-tunneling mechanism with 0.8 V of a writing voltage in 8 ns; the reading can be accomplished in 7 ns at −0.2 V. $116~\mu \text{s}$ of data retention at 25°C ( $101~\mu \text{s}$ at 75°C); $100~\mu \text{W}$ of the write power; $9.125~\mu \text{W}$ of the read power have been recorded as well. These experimental pieces of evidence suggest that our 1T1D embedded DRAM technology could replace the conventional 1-transistor-1-capacitance (1T1C) eDRAM one with better cost-efficiency and lower power in the advanced CMOS technology to 3-nm node.