Asymmetric bias-tunable surface adhesion of semiconductor nanofilms

ACTA MECHANICA SINICA(2023)

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摘要
Electrically tunable surface adhesion is of vital importance for ubiquitous microelectromechanical systems, and is normally symmetric to the applied bias voltage. Here we report the asymmetric bias-tunable surface adhesion of semiconductor nanofilms by taking molybdenum disulfide (MoS 2 ) as a demo with graphene, hexagonal boron nitride, and bulk n-type doped silicon serving as the normal control group. The bias-tunable adhesion force between the Au-coated tip and the Au back electrode supported MoS 2 nanofilms was deciphered by combining conductive atomic force microscopic examinations in vacuum and theoretical simulations. The asymmetric bias-tunability is found to be significantly stronger than that of the control group, attributing to the built-in electric field at the Schottky junction between the nanofilm and back electrode.
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关键词
Surface adhesion,Molybdenum disulfide,Conductive atomic force microscope,Schottky junction
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