Thermoreflectance-based approach for surface temperature measurements of thin-film gold sensors

REVIEW OF SCIENTIFIC INSTRUMENTS(2023)

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摘要
A novel thermoreflectance-based diagnostic tool capable of visualizing spatial and temporal changes in surface temperature is presented. The method uses narrow spectral emission bands of blue [lambda = 405 nm with 10 nm full-width-at-half-maximum (FWHM)] and green (lambda = 532 nm with 10 nm FWHM) light to monitor the optical properties of gold and thin-film gold sensors, relating changes in reflectivity to temperature through a known calibration coefficient. The system is made robust to tilt and surface roughness variations through the simultaneous measurement of both probing channels with a single camera. Experimental validation is performed on two forms of gold materials heated from room temperature to 200 ? at a rate of similar to 100 ?/min. Subsequent image analysis shows perceptible changes in reflectivity in the narrow band of green light, while the blue light remains temperature-insensitive. The reflectivity measurements are used to calibrate a predictive model with temperature-dependent parameters. The physical interpretation of the modeling results is given, and the strengths and limitations of the presented approach are discussed.
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