A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling

•The dual-mass z-axis fully decoupled MEMS gyroscope is presented.•Lower mechanical quadrature coupling is achieved by optimizing the quadrature stiffness of specific structure.•The MEMS gyroscope demonstrates a bias instability of 8.9 °/h and an angular random walk of 0.74 °/√h under open-loop angular rate sensing.•The nonlinearity of scale factor is 810 ppm in the full range of ±300°/s without temperature control.