Design and Characterization of a Novel High-bandwidth Flexure-guided XY Nanopositioner*

Design, mechanical modeling and characterization of a new flexure-guided piezo-electrically actuated nanopositioner are presented in this paper. The scan range of this planar scanner is 5.8µm in both X- and Y-directions with the first resonance frequency being above 15 kHz. Lateral displacements are measured using an interferometer sensor. In this paper, we focus on presenting the novelty of the mechanical design and characterization of the nanopositioner in terms of system dynamics and sensor noise, with the ultimate goal of controller design for high-speed SPM.