In-Run Navigation Grade Quartz MEMS-Based IMU

Emcore has demonstrated in-run navigation grade performance with a compact inertial measurement unit (IMU) based on Systron Donner Inertial technology. The IMU is based on three quartz MEMS Coriolis vibratory gyroscopes (CVG) and three quartz MEMS resonant accelerometers. Experimental characterization of the gyroscope revealed angle random walk lower than 0.001 °/√hr (0.05 (°/hr)/√Hz) as well as bias instability of 0.005 °/hr at stable temperature and on the order of 0.01 °/hr at uncontrolled temperature. The accelerometer demonstrated a velocity random walk of 50 ug/√Hz, with bias instability of a few μg. This performance was achieved within the SDI500 form factor of 19 cubic inches.