Hierarchically porous ZnO derived from zeolitic imidazolate frameworks for high-sensitive MEMS NO2 sensor

Three-dimensional (3D) porous metal oxide nanomaterials with controllable morphology and well-defined pore size have attracted extensive attention in the field of gas sensing. Herein, hierarchically porous ZnO-450 was obtained simply by annealing Zeolitic Imidazolate Frameworks (ZIF-90) microcrystals at an optimal temperature of 450 °C, and the effect of annealing temperature on the formation of porous nanostructure was discussed. Then the as-obtained ZnO-450 was employed as sensing materials to construct a Micro-Electro-Mechanical System (MEMS) gas sensor for detecting NO2. The MEMS sensor based on ZnO-450 displays the excellent gas-sensing performances at a lower working temperature (190 °C), such as high response value (242.18% @ 10 ppm), fast response/recovery time (9/26 s) and ultralow limit of detection (35 ppb). The ZnO-450 sensor shows better sensing performance for NO2 detection than ZnO-based composites materials or commercial ZnO nanoparticles (NPs), which are attributed to its unique hierarchically structures with high porosity and larger surface area. This ZIFs driven strategy can be expected to pave a new pathway for the design of high-performance NO2 sensors.