Centimeter scale color printing with grayscale lithography

Nanophotonics X(2024)

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摘要
Structural color from artificial structures, due to its environmental friendliness and excellent durability, represents a route for color printing applications. Among various physical mechanisms, the Fabry–Perot (F–P) cavity effect provides a powerful way to generate vivid colors in either the reflection or transmission direction. Most of the previous F–P type color printing works rely on electron beam grayscale lithography, however, with this technique it is challenging to make large-area and low-cost devices. To circumvent this constraint, we propose to fabricate the F–P type color printing device by the laser grayscale lithography process. The F–P cavity consists of two thin silver films as mirrors and a photoresist film with a spatially variant thickness as the spacer layer. By controlling the laser exposure dose pixel by pixel, a centimeter-scale full-color printing device with a spatial resolution up to 5 μm × 5 μm is demonstrated. The proposed large area color printing device may have great potential in practical application areas such as color displays, hyperspectral imaging, advanced painting, and so on.
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