Si Incorporation into AsSeGe Chalcogenides for High Thermal Stability, High Endurance and Extremely Low Vth Drift 3D Stackable Cross-Point Memory
2020 IEEE Symposium on VLSI Technology(2020)
摘要
By incorporating Si into AsSeGe system, we demonstrate a 3D stackable OTS+PCM memory in a 1k by 1k cross-point memory array with extremely low V
tS
drift (~0V after 3 days from programming), wide V
tS
/V
tR
window (>2V main distribution memory window), high endurance (>2E11 cycles), excellent I
OFF
and thermal stability. So far, attempts to improve the thermal stability of AsSeGe system sacrifice I
OFF
and cycling endurance. We show that Si incorporation relaxes this trade-off and can greatly improve the thermal stability and cycling endurance while also achieving good I
OFF
. In particular the I
OFF
of AsSeGeSi selector is improved over the AsSeGe system for films of 20 nm.
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关键词
VtR window,VtS drift,extremely low Vth drift 3D stackable cross-point memory array,high endurance,IOFF stability,main distribution memory window,PCM memory,OTS memory,cycling endurance while,high thermal stability,chalcogenides,silicon incorporation,time 3.0 d,size 20.0 nm,Si,AsSeGe,AsSeGeSi
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