A 286nW, 103V High Voltage Generator and Multiplexer for Electrostatic Actuation in Programmable Matter

Yimai Peng,Gordy Carichner,Yejoong Kim,Li-Yu Chen, Rémy Tribhout,Benoît Piranda,Julien Bourgeois,David Blaauw,Dennis Sylvester

2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)（2022）

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摘要

We present a high-voltage-generation-and-multiplexing (HVGM) chip, specifically designed for electrostatic actuation of micro-robots. It can individually control 12 pairs of +/- electrodes using a positive and negative charge pump and mux-structure, consumes 286nW in steady state and 533nW when transitioning a 10pF electrode at 155V/s, and produces a differential voltage of 103V (29× voltage gain from 3.6V) in measurement. We also show a complete microsystem of stacked die, measuring 3×1.4×1.1mm, including HVGM, processor, radio, and harvester for energy autonomous operation.

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关键词

electrostatic actuation,programmable matter,high-voltage-generation,microrobots,positive charge pump,negative charge pump,mux-structure,differential voltage,voltage gain,high voltage generator,high voltage multiplexer,high-voltage-generation-and-multiplexing,HVGM chip,complete microsystem,energy autonomous operation,voltage 3.6 V,power 533.0 nW,power 286.0 nW,voltage 103.0 V,capacitance 10.0 pF

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