Room temperature spectral characterization of direct band gap Ge0.85Sn0.15 LEDs and photodiodes
SILICON PHOTONICS XVII(2022)
摘要
Owing to their direct band gaps, (Si)GeSn all-group-IV alloys are promising candidates for light sources, photodetectors and modulators monolithically integrated onto a CMOS-compatible mid-infrared photonic platform. Several research teams have demonstrated optically pumped GeSn lasers, and, more recently, an electrically pumped GeSn laser at low operating temperature. Here, we studied Ge0.85Sn0.15-based light emitting diodes (LEDs) and photodiodes (PDs) operating at room temperature. The stack was grown on a p-doped Ge strain-relaxed buffer at low growth temperatures (below 350 degrees C) in a 200 mm chemical vapor deposition tool. Fabricated GeSn devices were characterized at room temperature with a Fourier-transform infrared spectrometer (FTIR) and an InSb detector. The spectral response of the FTIR InSb detector was calibrated with respect to a Deuterated Triglycine Sulfate detector (DTGS). This spectral response was then used to correct Ge0.85Sn0.15 LEDs emission spectra with emission maximum at 3.3 mu m. The cutoff wavelength at 3.7 mu m of the GeSn photodiode was finally obtained (at 0V bias) after correction of the Globar incident light spectrum. Such emission and detection open up promising perspectives for all-group-IV LEDs and PDs in applications such as gas sensing.
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关键词
Germanium-Tin, Fourier-transform infrared spectroscopy, FTIR calibration, Group-IV emitters, Photodetectors, LEDs
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