Optomechanical Analysis and Design of Polygon Mirror-Based Laser Scanners

APPLIED SCIENCES-BASEL(2022)

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摘要
Featured Application Applications of polygon mirror-based scanning heads include laser scanning, 2D and 3D printing, laser manufacturing, imaging, optical metrology, and Remote Sensing. Polygon Mirror (PM)-based scanning heads are one of the fastest and most versatile optomechanical laser scanners. The aim of this work is to develop a multi-parameter opto-mechanical analysis of PMs, from which to extract rules-of-thumbs for the design of such systems. The characteristic functions and parameters of PMs scanning heads are deduced and studied, considering their constructive and functional parameters. Optical aspects related to the kinematics of emergent laser beams (and of corresponding laser spots on a scanned plane or objective lens) are investigated. The PM analysis (which implies a larger number of parameters) is confronted with the corresponding, but less complex aspects of Galvanometer Scanners (GSs). The issue of the non-linearity of the scanning functions of both PMs and GSs (and, consequently, of their variable scanning velocities) is approached, as well as characteristic angles, the angular and linear Field-of-View (FOV), and the duty cycle. A device with two supplemental mirrors is proposed and designed to increase the distance between the GS or PM and the scanned plane or lens to linearize the scanning function (and thus to achieve an approximately constant scanning velocity). These optical aspects are completed with Finite Element Analyses (FEA) of fast rotational PMs, to assess their structural integrity issues. The study is concluded with an optomechanical design scheme of PM-based scanning heads, which unites optical and mechanical aspects-to allow for a more comprehensive approach of possible issues of such scanners. Such a scheme can be applied to other types of optomechanical scanners, with mirrors or refractive elements, as well.
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关键词
laser scanners, Polygon Mirrors (PMs), Galvanometer Scanners (GSs), scanning function, scanning velocity, Field-of-View (FOV), multi-parameter analysis, Finite Element Analysis (FEA), optomechanical design
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