High-Speed Steep-Slope GaInAs Impact Ionization MOSFETs (I-MOS) With SS = 1.25 mV/dec—Part I: Material and Device Characterization, DC Performance, and Simulation
IEEE Transactions on Electron Devices(2022)
摘要
Digital electronics power consumption evolved into a major concern: at the current pace, general-purpose computing energy consumption will exceed global energy production before 2045. The principal approach to curbing energy consumption in digital applications calls for “steep-slope” devices with an inverse subthreshold slope (
SS
) parameter well below the “ln(10)
$\cdot $
kT
/
${q}$
” limit of conventional electronics (60 mV/dec at 300 K). Impact ionization MOSFETs (I-MOS) provide an avenue for steep-slope device realization. High-mobility narrow gap III
-
V semiconductor channel materials have not yet been investigated for I-MOS applications. We hereby report E-mode narrow bandgap GaInAs-based I-MOS devices with an
SS
of 1.25 mV/dec maintained over five orders of magnitude in drain current and
${I}_{ \mathrm{\scriptscriptstyle ON}}/{I}_{ \mathrm{\scriptscriptstyle OFF}}$
ratios >10
6
at 300 K (>10
9
at 15 K) for a gate length of
${L}_{\text {G}} \,\,=100$
nm. Part I of this work focuses on the materials and device fabrication and analysis, device dc characterization, and modeling. The present GaInAs devices are the first I-MOS transistors to display a robust steep-slope effect at low voltages
${V}_{\text {DS}} < 1.9$
V at 300 K and < 1 V at 15 K. Part II describes the dynamic switching (including clarifications on the role of hysteresis) and RF characteristics of GaInAs I-MOS devices and benchmarks them with respect to other steep-slope technologies.
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关键词
Atomic layer deposition (ALD),GaInAs,impact ionization,impact ionization MOSFET (I-MOS),inverse subthreshold slope (SS),MOSFET,RF performance,steep slope
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