Suspended germanium membranes photodetector with tunable biaxial tensile strain and location-determined wavelength-selective photoresponsivity

A divergent microstructure was fabricated by complementary metal-oxide-semiconductor compatible processes on the central region of a Ge p-i-n photodetector to enhance the residual tensile strain. A tunable biaxial tensile strain of similar to 0.22%-1.01% was achieved by varying the geometrical factors, and it was confirmed by Raman measurements and finite element method simulations. The suspended germanium membranes enhance the absorption across the C- and L-bands (1528-1560 and 1561-1620 nm) and extend the cutoff wavelength to similar to 1700-1937 nm. The Ge absorption coefficient is enhanced by similar to 4.2x to 2951 cm(-1) at 1630 nm, which is comparable with that of In0.53Ga0.47As. Furthermore, due to the varying strain distribution on the Ge mesa, each photodetector presents the location-determined wavelength-selective photoresponsivity characteristics. This work offers a promising approach for adjusting the absorption spectra of the photodetector by harnessing geometrically amplified biaxial strain.