A Broadband Athermal Waveguides With Low Anomalous Dispersion

We propose and numerically investigate a double-cladded athermal waveguide structure aiming at broadband low anomalous dispersion operation. Single-crystal aluminum nitride (AlN) is the core of the waveguide, cladding with silicon oxide (SiO2) and titanium dioxide (TiO2). TiO2 with a negative thermo-optic coefficient (TOC) is used to realize material thermal compensation for AlN. By optimizing the waveguide structure parameters, it shows a near-zero broadband effective TOC, +/- 4x10(-6)/K over a 1770-nm bandwidth from 1830 to 3600 nm. Besides, it also has low anomalous dispersion, from -20 to 20 ps/nm/km in the same wavelength range. Different with the conventional strip waveguide, the waveguide is a double cladded structure, which is easy to fabricate in practice. Furthermore, this structure will not damage the single crystal state of aluminum nitride, maintaining its original excellent optical properties.