SPAD based Time of Flight Pixel Circuits for Large Scale Arrays

—L arge-scale 3D time of flight sensors face several challenges: high power consumption, large pixel pitch, mostly single-bin operation and/or a low count depth where multi-bin pixels are implemented. This paper presents a 2-bin and 4-bin SPAD pixel circuit with a 7 – 10 ENOB full well capacity and < 20 nW/MHz power consumption, at pixel pitches of 4.8 µm and 7.1 µm respectively.