An ultrafast temperature response analysis of a MEMS-based igniter using the finite-element method

This study reports the simulation and experiments of a MEMS-based igniter for a semiconductor bridge (SCB), which is fabricated using complementary metal oxide semiconductor technology. The finite-element method was first employed to simulate the ultrafast temperature response of the ignition process of SCB under conditions of an electro-exploding ignition, electro-thermal ignition, and no-ignition and to conduct a capacitor discharge stimulation. The recorded voltage from an oscilloscope was used as the initial condition, and conductivity values based on experimental data were taken as a key parameter for the polysilicon material to ensure the accuracy of the heat source loaded into the model. Under the electro-exploding ignition, the SCB was initially ignited at the sharp corners at the valley of the first voltage peak instead of the secondary peak. The maximum temperature of the SCB was no more than the melting point of the polysilicon material (except for the sharp corners) and only at 1369 ​K under the electro-thermal ignition and no-ignition conditions, respectively. The optical testing and ablation results of the bridge area demonstrate that the numerically simulated temperature is quite accurate. This method can be easily extended to other MEMS-based igniters for temperature prediction applications.