New Thin-Entrance window LGAD for Soft X-ray Detection at LCLS

New free electron lasers, such as SLAC's LCLS-II, will provide unique scientific imaging opportunities with soft xrays from 250eV-1.5KeV. In order to fully utilize these facilities, we need to develop detectors with both shallow entrance windows and adequate signal-to noise ratios to utilize the soft x-rays effectively. Low Gain Avalanche Detectors (LGADs) have the potential for improved signal-to-noise ratio due to the built-in amplification. However, the conventional LGAD structure is not conducive to a shallow entrance window. In this work, we propose a new LGAD device structure that can incorporate a shallow entrance window utilizing microwave annealing to activate the dopant in the entrance window. Process and device simulations are used to demonstrate the feasibility and performance of the proposed structure.