Design, Fabrication And Performance Of Enhanced Reactive Igniter Through Depositing Al/Cuo Nanolaminates Onto Nicr Micro-Heater

As the most important component for MEMS-based pyrotechnics, the micrometer should generate enough energy to successfully ignite the next explosive. An enhanced reactive igniter was designed and fabricated through sputtering the Al/CuO nanolaminates onto the NiCr micro-heater to enhance the output energy of the NiCr micro-heater. The average thickness of the Al/CuO nanolaminate is 6.84 mu m, and the designed thickness is 6 mu m. The grain sizes of Al/CuO nanolaminates are not uniform, and the particle grains of the Al/CuO nanolaminates at the top are smaller than those at the bottom. When the applied currents passed through the igniter, the resistance of the igniter changed dynamically, leading to the igniter experiencing three stages. Compared to the bare NiCr micro-heater without depositing Al/CuO nanolaminates, the enhanced reactive igniter can successfully ignite Zr/KClO4 explosive, indicating that the Al/CuO nanolaminates could enhance the output capability of the NiCr micro-heater. It is of vital importance to guide the design of MEMS-based pyrotechnics.