Broadband absorption coating for large-curvature surfaces by atomic layer deposition.

APPLIED OPTICS(2021)

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摘要
For many applications, large curvature surfaces or complicated 3D structures are required to absorb light that falls on them to reduce stray light or energy collection. A novel, to the best of our knowledge, strategy with a metal-dielectric film stack by the atomic layer deposition technique is put forward to achieve broadband absorption coating covering both sides of a quartz tube completely. Absorptive metallic material of titanium-aluminum-carbon composite and dielectric material of aluminum oxide (Al2O3) is employed to realize high absorption (>99%) for the 400-780 nm band with the configuration of a six-layer metal-dielectric film stack. Good angle insensitivity up to 50° for P- and S-polarizations is demonstrated experimentally with the proposed structure on a glass slab. The average absorption of the coated quartz tube reaches as high as 99% for all curving areas on the inner and outer sides, while the nonuniformity is confined to 1.5% for the axial and circumferential directions. This presented approach has enormous potential in the fields of optical detection, optical imaging, optical sensing, and energy management.
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