Laser-induced scanning transfer deposition of silver electrodes on glass surfaces: A green and scalable technology

APPLIED SURFACE SCIENCE(2021)

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摘要
A pulsed laser ablation backwriting technique with high repetitive rates is implemented for the fabrication of silver coatings on glass surfaces. This method enables geometrical constraint-free deposition of metallic coatings. These exhibit sufficiently low electrical resistance to be used as electrodes in dielectric barrier discharge (DBD) plasma elements. Ambient air deposition of metallic silver electrodes on standard glass slides is explored using a sub-ns UV laser source, combined with hybrid beam scanning methods. The green nature of the overall deposition process includes a preliminary irradiation scan to homogenise the target surface before the subsequent backwriting step. Metal transfer is achieved by combining two phenomena within a simple beam scanning process: LIRT (laserinduced reverse transfer) of silver from the target to the glass, with a partial and secondary LIFT (Laser-Induced Forward Transfer) of silver from the glass to the target. Appropriate selection of pulse energy and pulse repetition rates, beam scanning velocities and target motion enable the growth of sufficiently thick Ag deposits on glass with the required low electrical resistivity and nearly 2D constraint-free geometry. This method avoids the use of vacuum and liquids, resulting in a cheap, facile and green methodology for the deposition of silver electrodes onto transparent substrate surfaces.
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关键词
LIRT, DBD, Laser ablation, Metallization, Glass
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