Performance Improvement For Mems Gyroscopes By Suppressing The Circuit Phase Delay

This paper analyzes the impact of the interface circuit phase delay both in gyroscope drive mode and sense mode. An automatic signal processing algorithm for eliminating the impact of circuit phase delay is proposed, which combines the modified double sideband demodulation in the drive mode, quadrature nulling, force rebalanced control in the sense mode together. The impact of circuit phase delay on gyroscope performance is validated by experiments. With the impact of interface circuit phase delay suppressed, bias instability and angle random walk of the fully-symmetrical slot-structure gyroscope are 0.229 degrees/h and 0.011 degrees/root h, respectively, improved by 3.48 times and 10 times compared to the condition without phase suppression. After is average, the instability of 0.0004 degrees/s in the standard deviation is achieved.