A Pressure Sensing System with ±0.75 mmHg (3σ) Inaccuracy for Battery-Powered Low Power IoT Applications.

This work presents an energy-efficient piezoresistive pressure sensing system for low-power IoT applications. The sensor adopts duty-cycling and sub-ranging to achieve high energy efficiency and accuracy. Fabricated in 180nm CMOS, the test chip with pressure transducer achieves state-of-art energy efficiency of 6.1 nJ·mmHg ² with ±0.75 mmHg 3σ inaccuracy. The sensor is integrated into a wireless sensor node to demonstrate its operation at a system level.