High energy product FexPt100-x thin films (x=60-66) prepared by rapid thermal annealing

H. W. Chang, F. T. Yuan,C. Y. Shen, M. F. Huang, C. Y. Hung,C. R. Wang,W. C. Chang

Surface and Coatings Technology(2020)

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摘要
Magnetic properties of sputtered FexPt100-x (x = 60–66) thin films via rapid thermal annealing (RTA) are studied. The structural results show that FexPt100-x films through RTA at Ta above 400 °C exhibit (00L) texture. (00L) texture is considered to result from L10 phase and L12 phase. All studied FexPt100-x films through RTA at Ta = 300–600 °C exhibit strong in-plane magnetic anisotropy with well-squared M-H curve and good permanent magnetic properties. Fine microstructure with small size of grain here gives arise to high Mr and good squareness of demagnetization curve. Magnetic force microscopy shows a fine interaction domain. Strong exchange coupling effect between grains due to fine microstructure results in high remanence and therefore (BH)max. As a result, high coercivity of 5.7 kOe and a maximum (BH)max of 26.0 MGOe are achieved. The results of this study reveal that Fe-rich FexPt100-x thin films (x = 60–66) through RTA is a cost-effective and simple method to obtain high energy product, which could be useful for related applications.
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关键词
Fe-Pt films,Rapid thermal annealing,Energy product
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