The dependence of aluminum lattice orientation on semiconductor lattice parameter in planar InAs/Al hybrid heterostructures

Journal of Crystal Growth(2020)

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摘要
We present a detailed study of 7-nm thick Al layers epitaxially grown on InxAl1−xAs or Al1−xGaxSbyAs1−y (0 0 1) semiconductors using high-resolution transmission electron microscopy (HRTEM) and synchrotron X-ray diffraction (XRD). These techniques provide high spatial and high reciprocal space resolution information about Al lattice orientations and interfacial structure, highlighting the existence of a strong correlation between the surface lattice parameter of the semiconductor and the normal orientation of the aluminum film. The normal orientation of Al layers is found to be [1 1 1] when the in-plane semiconductor surface lattice parameter, aS, is smaller than 5.98 Å, and is [1 1 0] when aS is larger than this value. In the transition between these lattice parameters where one orientation is preferred, both orientations may be observed. Concomitant with the change in normal orientation is an inversion in the strain state of the aluminum film. When the normal orientation is [1 1 1], the Al film is compressively strained; while for [1 1 0] normal orientations, the Al in-plane strain is tensile. An energy balance model, accounting for surface, interfacial, side-face, and strain energy, and the registry of (111¯) lattice planes across the semiconductor/aluminum interface provide explanations for the observed normal orientation and strain inversion.
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关键词
A1. Crystal structure,A1. Transmission electron microscopy,A1. X-ray diffraction,A3. Molecular beam epitaxy,B2. Semiconducting III–V materials
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