A new high-bandwidth nanopositioning tracking control method with input shaper and integral resonance controller

This paper proposes a novel high-bandwidth control scheme of piezo-actuated nanopositiong stages. Firstly, an integral resonant controller (IRC) is added into the standard PI control scheme as damping controller to reduce the impact of unmodeled dynamics and improve the system damping ratio to some extent. Then, an inner input shaper (IS) as feed-forward controller is designed to suppress the vibration arising from the poor damping performance of IRC controller. Experimental results demonstrate that PI controller combining with input shaper and IRC (PI+IRC+IS) can improve the bandwidth by 2.5 times more than PI+IRC control and 8 times more than PI control.