Capacitance Deviation Caused by Mechanical Deformation of MEMS Inertial Structure

Jacek Nazdrowicz,Adam Stawinski,Andrzej Napieralski

2020 27th International Conference on Mixed Design of Integrated Circuits and System (MIXDES)（2020）

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摘要

Authors presents a very important problem of estimation capacitance structures used in MEMS sensors. The importance comes from the fact that during operation, inertial sensors deform under influence of external forces. The result of the problem is visible in capacitance deviations what directly may be seen in accuracy sensor measurement.

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关键词

MEMS,accelerometer,vibratory gyroscope,thermal expansion,temperature effect,capacitance

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