Full-Chip Electro-Thermal Coupling Extraction and Analysis for Face-to-Face Bonded 3D ICs

Due to the short die-to-die distance and inferior heat dissipation capability, Face-to-Face (F2F) boned 3D ICs are often considered to be vulnerable to electrical and thermal coupling. This study is the first to quantify the impacts of the electro-thermal coupling on the full-chip timing, power, and performance. We first present an implementation flow for realistic F2F 3D ICs including pad layers and power grids. Then, we propose our signal integrity analysis, parasitic extraction, and thermal analysis flows. Next, we investigate the impacts of the coupling on the delay, power, and noise of F2F 3D ICs, and provide guidelines to mitigate these effects. Our experimental results show that the inter-die electrical coupling causes up to 5.81% timing degradation and 4.00% noise increase, while the thermal coupling leads to less than 0.41% timing degradation and nearly no noise increase. The impact of the combined electro-thermal coupling on delay and noise reaches 6.07% and 4.05%, respectively.