Performance of assembled X-ray optics consisted of a polycapillary X-ray optics and a monocapillary X-ray optics for micro X-ray fluorescence spectrometry

A micro X-ray fluorescence (μ-XRF) spectrometry instrument based on an assembled X-ray optics was constructed in the laboratory. The assembled X-ray optics consisted of a polycapillary slightly focusing X-ray lens and a tapered monocapillary X-ray lens (TMXRL). The output X-ray beam of the polycapillary slightly focusing X-ray lens was focused again by the TMXRL. A TMXRL with output aperture of 12.01 μm was drawn by a nested glass tube. To evaluate the performance of the instrument, a performance comparison between different capillary X-ray optics was conducted. The intensity of the Fe Kα from an iron plate was used to indicate the analysis efficiency of the μ-XRF instrument. The relative gain of the instrument was corrected by comparing the intensity per unit area for a pinhole aperture. Compared with TMXRL single used, the assembled X-ray optics also had a micro focal spot. Furthermore, the relative gain of the assembled X-ray optics and the intensity of the Fe Kα from the iron plate obtained by the assembled X-ray optics were approximately 5 times those of the TMXRL single used. This highly intense micro X-ray beam with several diameters obtained by the assembled X-ray optics will be useful for μ-XRF analysis.