Structural and Magnetic Properties of CoPd Alloys for Non-Volatile Memory Applications
2019 IEEE Workshop on Microelectronics and Electron Devices (WMED)(2019)
摘要
We have intensively studied perpendicular magnetic anisotropy (PMA) CoPd alloys, both structurally and magnetically, as a simple means of pinning MgO-based perpendicular magnetic tunnel junctions (pMTJs) for spin-transfer torque magnetic tunnel junction (STT-MRAM) applications. A compositional study of the Co
x
Pd
100-x
alloys at 50 nm thickness showed that the maximum coercivity and anisotropy was found for Co
25
Pd
75
. Perpendicular magnetic tunnel junction stacks were deposited using different compositions of CoPd. Current-in-plane tunneling measurements indicated that the TMR values roughly correlated with the coercivity and anisotropy of the single layers. A thickness study indicated that the alloy was fully perpendicular for thicknesses as low as 20 nm. Various seed layers were employed to optimize the coercivity of the Co
25
Pd
75
layer. Magnetometry, X-ray diffraction (XRD) and scanning electron microscopy (SEM) studies were carried out to relate the magnetic and structural properties of these layers.
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关键词
perpendicular magnetic tunnel junctions,CoPd alloys,coercivity,anisotropy,seed layers,XRD,SEM
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