Fabrication and Characterization of a SU-8 Epoxy Membrane-Based Thermopile Detector With an Integrated Multilayered Absorber Structure for the Mid-IR Region
IEEE Sensors Journal(2019)
摘要
This paper reports on the fabrication and characterization of a thermopile detector with an integrated mid-infrared absorber structure. The fabricated absorber structure has shown an absorption of more than 95% in the wavelength range of 3.2–5.47
${\mu }\text{m}$
. The detector was fabricated with standard cleanroom process techniques and equipments. The serial resistance was measured at about 315
$\text{k}{\Omega }$
at room temperature. The photosensitivity of the detector was characterized for a signal wavelength (4.26
${\mu }\text{m}$
) and a band of wavelength ranging from 2.5–5.5
${\mu }\text{m}$
through two different measurement setups. In the first measurement setup, the photosensitivity was estimated at 57.5
$\textrm {V}\cdot \textrm {mm}^{ {2}}\cdot {W}^{-1}$
through a MEMS-based infrared radiation source and with an optical band-pass filter of wavelength 4.26
${\mu }\text{m}$
. The following characterization was performed to characterize the photosensitivity of the detector in a broader wavelength range. This measurement was taken using a monochromator setup utilizing a reference photodetector for calculations of the optical power of the infrared source. The photosensitivity and the specific detectivity (
$\text{D}^{\ast }$
) of the fabricated detector were measured to values of 30–92
$\textrm {V}\cdot \textrm {W}^{-1}$
and
$8.0\times 10^{7}-2.4\times 10^{ {8}}\,\,\textrm {cm}\cdot \textrm {Hz}^{1/2}\cdot \textrm {W}^{-1}$
, respectively, in the wavelength range of 2.8–5
${\mu }\text{m}$
. The time constant was estimated to around 21 ms.
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关键词
Detectors,Thermal conductivity,Absorption,Fabrication,Thermal sensors,Wavelength measurement,Metals
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