Full 3D simulation of SAW resonators using hierarchical cascading FEM

Finite element methods are often used to simulate surface acoustic wave (SAW) resonators. Usually, only bi-dimensional or periodic models are practical on long resonators. The hierarchical cascading method proposed in 2016 uses the repetitive structure of a SAW resonator to obtain a computation time proportional to the logarithm of the electrode number. Using this approach, a full 3D simulation of SAW resonators becomes possible. The full 3D simulation of leaky SAW and temperature compensated SAW resonators is demonstrated.