Fabrication Of Polymer Microneedle Array Based On Tungsten Mold And Optimized Replication Method

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)(2018)

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摘要
Fabrication of high performance tungsten microneedle array (MNA) which has tunable height and diameter is reported for the first time. Further, stable replication of cycloolefine copolymer (COC) MNA is achieved using novel vacuum isostatic hot embossing followed by PDMS casting with tungsten MNA mold. Radius of needlepoint is less than 1 mu m while microneedle height reaches as high as 100 mu m. High hardness of tungsten ensures reliability of mold which offers commercial potential for this method.
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关键词
polymer microneedle array,optimized replication method,stable replication,cycloolefine copolymer MNA,tungsten MNA mold,microneedle height,high performance tungsten microneedle array,vacuum isostatic hot embossing,PDMS casting,W
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